JPH0627948Y2 - 高周波グロー放電装置の電極構造 - Google Patents

高周波グロー放電装置の電極構造

Info

Publication number
JPH0627948Y2
JPH0627948Y2 JP5921288U JP5921288U JPH0627948Y2 JP H0627948 Y2 JPH0627948 Y2 JP H0627948Y2 JP 5921288 U JP5921288 U JP 5921288U JP 5921288 U JP5921288 U JP 5921288U JP H0627948 Y2 JPH0627948 Y2 JP H0627948Y2
Authority
JP
Japan
Prior art keywords
electrode
glow discharge
divided frame
divided
discharge device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5921288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01163328U (en]
Inventor
博 高宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP5921288U priority Critical patent/JPH0627948Y2/ja
Publication of JPH01163328U publication Critical patent/JPH01163328U/ja
Application granted granted Critical
Publication of JPH0627948Y2 publication Critical patent/JPH0627948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP5921288U 1988-04-30 1988-04-30 高周波グロー放電装置の電極構造 Expired - Lifetime JPH0627948Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5921288U JPH0627948Y2 (ja) 1988-04-30 1988-04-30 高周波グロー放電装置の電極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5921288U JPH0627948Y2 (ja) 1988-04-30 1988-04-30 高周波グロー放電装置の電極構造

Publications (2)

Publication Number Publication Date
JPH01163328U JPH01163328U (en]) 1989-11-14
JPH0627948Y2 true JPH0627948Y2 (ja) 1994-07-27

Family

ID=31284995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5921288U Expired - Lifetime JPH0627948Y2 (ja) 1988-04-30 1988-04-30 高周波グロー放電装置の電極構造

Country Status (1)

Country Link
JP (1) JPH0627948Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4541114B2 (ja) * 2004-07-06 2010-09-08 積水化学工業株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPH01163328U (en]) 1989-11-14

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